Comparison of solid-state microwave annealing with conventional furnace annealing of ion-implanted SiC
| Publication Type | Journal Article | |
| Year of Publication | 2007 | |
| Authors | Sundaresan, S.G.; Rao, M.V.; Tian, Y.; Schreifels, J.A.; Wood, M.C.; Jones, K.A.; Davydov, A.V. | |
| Journal Title | Journal of Electronic Materials | |
| Volume | 36 | |
| Pages | 324-331 | |
| Notes | Journal Article | |
| Department | CHEM | |
| Export | Tagged XML BibTex |