Dr. Michael A. Huff is the Founder and Director of the MEMS and Nanotechnology Exchange (MNX) at Corporation for National Research Initiatives (CNRI). Prior to starting the MNX, Dr. Huff was on the faculty in the Department of Electrical Engineering and Applied Physics at Case Western Reserve University (CWRU), where he became a recognized expert in MEMS technology. Before joining the faculty at CWRU, Dr. Huff held the position of Fellow at the Baxter Healthcare Corporation in Deerfield, Illinois. He directed Baxter’s corporate-wide efforts in applying MEMS technology to new and novel medical devices and systems and managed an engineering development team charged with developing new products for various Baxter business divisions as well as performing technical due diligence on potential Corporate acquisitions. Dr. Huff has actively participated in MEMS research and development for over twenty years, published numerous papers on MEMS and Nano devices and fabrication technologies, and published a book chapter on the Fundamentals of MicroElectroMechanical Systems in the McGraw-Hill publication entitled “Semiconductor Manufacturing Handbook,” edited by Hwaiyu Geng, McGraw-Hill, New York 2005. Dr. Huff also holds twelve patents for MEMS devices and technologies, and has several others pending. In addition to his research accomplishments, Dr. Huff has managed the development of several successful products based on MEMS devices in the health care markets. Dr. Huff graduated with a B.S. (highest honors) in Electrical Engineering. Subsequently, he was hired as a principal design engineer at the Missile Systems Division of Raytheon Company in Bedford, Massachusetts where he designed advanced signal acquisition systems for the Patriot Missile Radar Platform. He subsequently graduated with a S.M. degree in Electrical Engineering and Computer Science, and a S.M. degree in Material Science and Engineering (specialization in electronic materials) from MIT. Dr. Huff received a Ph.D. in Electrical Engineering and Computer Science from MIT. His Ph.D. thesis research pioneered silicon wafer bonding, a key MEMS fabrication technique for the embodiment of several novel MEMS devices, including a pressure-balanced, electrostatically-actuated microvalve and a threshold pressure switch with mechanical hysteresis, as well as several MEMS products. Dr. Huff received a Glennan Award from CWRU and has been featured in numerous magazine and newspaper articles for his work in MEMS technology. Dr. Huff is a member of numerous professional and honorary societies including: Sigma Xi, Eta Kappa Nu, IEEE, ASME, Electrochemical Society, ASTM, Optical Society of America, and the SPIE. Dr. Huff also served on the Technical Program Committee to the Solid-State Sensor and Actuator Workshop in 2006, served on the Technical Program Committee to International Solid-State Sensor and Actuator Conference (Transducers 07) in 2007, and has served as the Chair of the North American Standards Committee on MEMS technology in SEMI in 2004 and 2005. Dr. Huff is also a Vice-President at CNRI.
Founder and Director
MEMS and Nanotechnology Exchange